Consumable items and original spare parts for your deposition systemHHV Ltd offers a range of process consumables, spare parts and accessories for your coating system.
Our range of process consumables has been specially selected for use with the original E306, Auto306 and Auto500 resistance and electron beam sources.
We also supply consumables for the Edwards / HHV ScanCoat Six bench-top SEM sample coater.
We supply additional or replacement process accessories such as filament holders, substrate heaters and work holders which are made to original Edwards drawings and quality. We can also provide consumables for older Edwards systems such as S150B, E306, 12E, 19E, E610 – please contact us with your requirements.
"Specially selected for use with resistance sources on the Auto306 and Auto500 systems, these sources are also suitable for use with the older E306 and E306A coating systems. Note: Dimensions are nominal
Type
Description
A (mm)
B (mm)
C (mm)
D (mm)
Typical current (A)
Part number
Type
Type
Description
Description
A (mm)
A (mm)
B (mm)
B (mm)
C (mm)
C (mm)
D (mm)
D (mm)
Typical current (A)
Typical current (A)
Part number
Part number
WA2
Tungsten filament
75
4.8
25
-
40-60
100102
Type
WA2
Description
Tungsten filament
A (mm)
75
B (mm)
4.8
C (mm)
25
D (mm)
-
Typical current (A)
40-60
Part number
100102
WA4
Tungsten filament
75
6
25
-
40-60
100104
Type
WA4
Description
Tungsten filament
A (mm)
75
B (mm)
6
C (mm)
25
D (mm)
-
Typical current (A)
40-60
Part number
100104
WB2
Tungsten basket
75
4.8
12
-
40-60
100152
Type
WB2
Description
Tungsten basket
A (mm)
75
B (mm)
4.8
C (mm)
12
D (mm)
-
Typical current (A)
40-60
Part number
100152
WB6
Tungsten basket
75
13
12
-
80-100
100156
Type
WB6
Description
Tungsten basket
A (mm)
75
B (mm)
13
C (mm)
12
D (mm)
-
Typical current (A)
80-100
Part number
100156
MC1
Molybdenum dimple boat
48
5
1.5
6
60-70
100201
Type
MC1
Description
Molybdenum dimple boat
A (mm)
48
B (mm)
5
C (mm)
1.5
D (mm)
6
Typical current (A)
60-70
Part number
100201
WC1
Tungsten dimple boat
48
5
1.5
6
70-80
100202
Type
WC1
Description
Tungsten dimple boat
A (mm)
48
B (mm)
5
C (mm)
1.5
D (mm)
6
Typical current (A)
70-80
Part number
100202
TC1
Tantalum dimple boat
48
5
1.5
6
50-60
100203
Type
TC1
Description
Tantalum dimple boat
A (mm)
48
B (mm)
5
C (mm)
1.5
D (mm)
6
Typical current (A)
50-60
Part number
100203
MC3
Molybdenum dimple boat
48
9
3
10
100-120
100301
Type
MC3
Description
Molybdenum dimple boat
A (mm)
48
B (mm)
9
C (mm)
3
D (mm)
10
Typical current (A)
100-120
Part number
100301
WC3
Tungsten dimple boat
48
9
3
10
140-150
100302
Type
WC3
Description
Tungsten dimple boat
A (mm)
48
B (mm)
9
C (mm)
3
D (mm)
10
Typical current (A)
140-150
Part number
100302
TC3
Tantalum dimple boat
48
9
3
10
100-120
100303
Type
TC3
Description
Tantalum dimple boat
A (mm)
48
B (mm)
9
C (mm)
3
D (mm)
10
Typical current (A)
100-120
Part number
100303
WC4AO
Alumina-coated tungsten dimple boat
102
12
3
13
130-140
100501
Type
WC4AO
Description
Alumina-coated tungsten dimple boat
A (mm)
102
B (mm)
12
C (mm)
3
D (mm)
13
Typical current (A)
130-140
Part number
100501
These liners are matched to the Edwards / HHV EB3 electron beam source. Available in graphite, molybdenum, boron nitride, intermetallic and aluminium oxide.
We also offer replacement filaments for the EB3 source. The EB3 filament also fits the older Edwards EB1 source.
EB3 electron beam source crucible liners and filaments
Type
Description
Part number
Equivalent to Edwards number
Type
Type
Description
Description
Part number
Part number
Equivalent to Edwards number
Equivalent to Edwards number
4CCGR
Graphite liner for EB source with 4cc crucible
100401
E09088030
Type
4CCGR
Description
Graphite liner for EB source with 4cc crucible
Part number
100401
Equivalent to Edwards number
E09088030
4CCGR
Molybdenum liner for EB3 source with 4cc crucible
100402
E09088032
Type
4CCGR
Description
Molybdenum liner for EB3 source with 4cc crucible
Part number
100402
Equivalent to Edwards number
E09088032
4CCBN
Boron nitride liner for EB3 source with 4cc crucible
100403
-
Type
4CCBN
Description
Boron nitride liner for EB3 source with 4cc crucible
Part number
100403
Equivalent to Edwards number
-
4CCIN
Intermetallic liner for EB3 source with 4cc crucible
100404
E09088033
Type
4CCIN
Description
Intermetallic liner for EB3 source with 4cc crucible
Part number
100404
Equivalent to Edwards number
E09088033
4CCAO
Aluminium oxide liner for EB3 source with 4cc crucible
100405
-
Type
4CCAO
Description
Aluminium oxide liner for EB3 source with 4cc crucible
Part number
100405
Equivalent to Edwards number
-
EB3FIL
Filament for the EB3 source (also fits EB1)
100411
E03615005
Type
EB3FIL
Description
Filament for the EB3 source (also fits EB1)
Part number
100411
Equivalent to Edwards number
E03615005
High-quality 14mm diameter, 6MHz quartz crystals for use with Edwards FTM5, FTM6 and FTM7 film thickness monitors, plus equipment from Inficon, Sigma, Intellemetrics and other manufacturers.
Quartz monitor crystals :
Type
Description
Part number
Equivalent to Edwards number
Type
Type
Description
Description
Part number
Part number
Equivalent to Edwards number
Equivalent to Edwards number
CRYS01
14mm, 6MHz quartz crystal, gold coated
300021
E08668000
Type
CRYS01
Description
14mm, 6MHz quartz crystal, gold coated
Part number
300021
Equivalent to Edwards number
E08668000
CRYS02
14mm, 6MHz quartz crystal, silver coated
300022
-
Type
CRYS02
Description
14mm, 6MHz quartz crystal, silver coated
Part number
300022
Equivalent to Edwards number
-
E09028000 : Resistance source
Domed bell jar chambers
E09039000 : Carbon rod source
Cylindrical glass chambers
Original Product code
Description
Original Product code
Original Product code
Description
Description
D15701042
Fluoroelastomer gasket Scancoat6
Original Product code
D15701042
Description
Fluoroelastomer gasket Scancoat6
E00100202
Nitrile gasket Scancoat6
Original Product code
E00100202
Description
Nitrile gasket Scancoat6
E00100234
Emitter flanged insulating bush
Original Product code
E00100234
Description
Emitter flanged insulating bush
E02512000
Domed bell jar kit
Original Product code
E02512000
Description
Domed bell jar kit
E02701003
Carbon Rod 6.35 X 120mm Long
Original Product code
E02701003
Description
Carbon Rod 6.35 X 120mm Long
E02703004
Cermet Hearth 6 Position EBS Pk5
Original Product code
E02703004
Description
Cermet Hearth 6 Position EBS Pk5
E03300012
Insulator Bush
Original Product code
E03300012
Description
Insulator Bush
E03615005
Filament For EB1/EB3 Sources Pack Of 10
Original Product code
E03615005
Description
Filament For EB1/EB3 Sources Pack Of 10
E03615015
Magnet For Bent Beam Source
Original Product code
E03615015
Description
Magnet For Bent Beam Source
E03615017
Liner Intermetallic Hearth
Original Product code
E03615017
Description
Liner Intermetallic Hearth
E03615018
Copper Crucible Hearth For Bent Beam source
Original Product code
E03615018
Description
Copper Crucible Hearth For Bent Beam source
E03615021
Carbon Hearth Liner For Bent Beam Source
Original Product code
E03615021
Description
Carbon Hearth Liner For Bent Beam Source
E03619015
Filaments 6 Position EBS Pk5
Original Product code
E03619015
Description
Filaments 6 Position EBS Pk5
E04805011
Gasket 12 Viton for E306 / Auto306 chamber
Original Product code
E04805011
Description
Gasket 12 Viton for E306 / Auto306 chamber
E05201000
Specimen cooling finger
Original Product code
E05201000
Description
Specimen cooling finger
E06900067
Implosion Guard Closed E306A
Original Product code
E06900067
Description
Implosion Guard Closed E306A
E06900155
Implosion Guard Open E306A
Original Product code
E06900155
Description
Implosion Guard Open E306A
E06902002
Workchamber 12 x 14 E306A Glass Cylinder
Original Product code
E06902002
Description
Workchamber 12 x 14 E306A Glass Cylinder
E08508040
3mm Carbon Rod Shaper
Original Product code
E08508040
Description
3mm Carbon Rod Shaper
E08519011
Fixed Collett 6.35mm
Original Product code
E08519011
Description
Fixed Collett 6.35mm
E08519012
Moving Collett 6.35mm
Original Product code
E08519012
Description
Moving Collett 6.35mm
E08519013
Moving Collett 3mm
Original Product code
E08519013
Description
Moving Collett 3mm
E08519015
Spring Carbon Evaporation Source
Original Product code
E08519015
Description
Spring Carbon Evaporation Source
E08519018
Mica Insulator C Evs
Original Product code
E08519018
Description
Mica Insulator C Evs
E08519022
Fixed Collett 3mm
Original Product code
E08519022
Description
Fixed Collett 3mm
E08519030
Carbon Rod 3mm X 300mm Pk 20
Original Product code
E08519030
Description
Carbon Rod 3mm X 300mm Pk 20
EB3 Electron beam source, spares, and accessories
E09072000 EB3 source plus filaments and hearth liners
Original Product code
Description
Original Product code
Original Product code
Description
Description
E08535000
TEM magnetic grid holder for Rotatilt3
Original Product code
E08535000
Description
TEM magnetic grid holder for Rotatilt3
E08569003
Braid Assembly
Original Product code
E08569003
Description
Braid Assembly
E08570011
Motor & Gearbox Rotatilt 3
Original Product code
E08570011
Description
Motor & Gearbox Rotatilt 3
E08571000
3mm TEM Grid Holder For Rotatilt 3
Original Product code
E08571000
Description
3mm TEM Grid Holder For Rotatilt 3
E08572000
SEM Planetary Workholder For Rotatilt 3
Original Product code
E08572000
Description
SEM Planetary Workholder For Rotatilt 3
E08573000
Plane Workholder For Rotatilt3
Original Product code
E08573000
Description
Plane Workholder For Rotatilt3
E08664000
FTM6 Film Thickness Monitor
Original Product code
E08664000
Description
FTM6 Film Thickness Monitor
E08666000
FTM5/FTM6/FTM7 Oscillator & Cable
Original Product code
E08666000
Description
FTM5/FTM6/FTM7 Oscillator & Cable
E08667000
FTM5/FTM6/FTM7 Crystal Holder
Original Product code
E08667000
Description
FTM5/FTM6/FTM7 Crystal Holder
E08667002
Cable Assembly 750mm Long
Original Product code
E08667002
Description
Cable Assembly 750mm Long
E08667018
Spring Clip Spare
Original Product code
E08667018
Description
Spring Clip Spare
E08668000
Spare Crystals FTM5/6/7 Pk5
Original Product code
E08668000
Description
Spare Crystals FTM5/6/7 Pk5
E08669000
FTM7 Film Thickness Monitor
Original Product code
E08669000
Description
FTM7 Film Thickness Monitor
E08703047
Cylinder Glass S150A/B ETD4 Scancoat 6
Original Product code
E08703047
Description
Cylinder Glass S150A/B ETD4 Scancoat 6
E08703048
Implosion Guard For S150A
Original Product code
E08703048
Description
Implosion Guard For S150A
E08712072
Copper Target For Scancoat 6 & S150B
Original Product code
E08712072
Description
Copper Target For Scancoat 6 & S150B
E08732000
Platinum Target Scancoat 6 &S150B
Original Product code
E08732000
Description
Platinum Target Scancoat 6 &S150B
E08733000
Gold/Palladium Target, SC6 & S150B
Original Product code
E08733000
Description
Gold/Palladium Target, SC6 & S150B
E08734000
Iron Target For Scancoat 6 & S150B
Original Product code
E08734000
Description
Iron Target For Scancoat 6 & S150B
E08741000
Shutter For Scancoat 6 & S150B
Original Product code
E08741000
Description
Shutter For Scancoat 6 & S150B
E08742000
Metallurgical Sample Holder For S150B
Original Product code
E08742000
Description
Metallurgical Sample Holder For S150B
E09020000
Bell Jar Lift For Auto306
Original Product code
E09020000
Description
Bell Jar Lift For Auto306
E09021000
Plasmaglo glow-discharge accessory
Original Product code
E09021000
Description
Plasmaglo glow-discharge accessory
E09022000
Tripod
Original Product code
E09022000
Description
Tripod
Electrical feed throughs
E10014000 and E10034000
Original Product code
Description
Original Product code
Original Product code
Description
Description
E09023000
Baffle plate
Original Product code
E09023000
Description
Baffle plate
E09024000
Quartz Lamp Heater 500W
Original Product code
E09024000
Description
Quartz Lamp Heater 500W
E09025000
DC glow discharge bar
Original Product code
E09025000
Description
DC glow discharge bar
E09026000
Radiant Heater For Auto 306
Original Product code
E09026000
Description
Radiant Heater For Auto 306
E09027000
Glass Cylinder Chamber Kit For Auto 306
Original Product code
E09027000
Description
Glass Cylinder Chamber Kit For Auto 306
E09028000
Filament Holder For Auto 306
Original Product code
E09028000
Description
Filament Holder For Auto 306
E09029000
Rotatilt 3 work holder drive unit
Original Product code
E09029000
Description
Rotatilt 3 work holder drive unit
E09032000
Manual Source shutter
Original Product code
E09032000
Description
Manual Source shutter
E09033000
LT selector switch
Original Product code
E09033000
Description
LT selector switch
E09035000
HT/LT current controller
Original Product code
E09035000
Description
HT/LT current controller
E09037018
Insulator Pvzm0300
Original Product code
E09037018
Description
Insulator Pvzm0300
E09037019
Insulator Pvzm0301
Original Product code
E09037019
Description
Insulator Pvzm0301
E09037026
Intermetallic Hearth Pk Of 5
Original Product code
E09037026
Description
Intermetallic Hearth Pk Of 5
E09038000
Four position turret resistance source
Original Product code
E09038000
Description
Four position turret resistance source
E09038018
Split Bush Female Insulator
Original Product code
E09038018