HHV LtdThin film deposition tools for science and industry

HHV LtdThin film deposition tools for science and industry

Spares and consumables for Edwards Auto 306 and HHV thin film systems

Spares and Consumables

Consumable items and original spare parts for your deposition systemHHV Ltd offers a range of process consumables, spare parts and accessories for your coating system.
Our range of process consumables has been specially selected for use with the original E306, Auto306 and Auto500 resistance and electron beam sources.
We also supply consumables for the Edwards / HHV ScanCoat Six bench-top SEM sample coater.
We supply additional or replacement process accessories such as filament holders, substrate heaters and work holders which are made to original Edwards drawings and quality. We can also provide consumables for older Edwards systems such as S150B, E306, 12E, 19E, E610 – please contact us with your requirements.

Thin Film Technology | Atomic Layer Deposition

Filaments and boats for resistance evaporation sources

"Specially selected for use with resistance sources on the Auto306 and Auto500 systems, these sources are also suitable for use with the older E306 and E306A coating systems. Note: Dimensions are nominal

Reactive Ion Etching Systems | Advanced Thin Film Technology
    • Type

    • Description

    • A (mm)

    • B (mm)

    • C (mm)

    • D (mm)

    • Typical current (A)

    • Part number

    • Type

    • Type

    • Description

    • Description

    • A (mm)

    • A (mm)

    • B (mm)

    • B (mm)

    • C (mm)

    • C (mm)

    • D (mm)

    • D (mm)

    • Typical current (A)

    • Typical current (A)

    • Part number

    • Part number

    • WA2

    • Tungsten filament

    • 75

    • 4.8

    • 25

    • -

    • 40-60

    • 100102

    • Type

    • WA2

    • Description

    • Tungsten filament

    • A (mm)

    • 75

    • B (mm)

    • 4.8

    • C (mm)

    • 25

    • D (mm)

    • -

    • Typical current (A)

    • 40-60

    • Part number

    • 100102

    • WA4

    • Tungsten filament

    • 75

    • 6

    • 25

    • -

    • 40-60

    • 100104

    • Type

    • WA4

    • Description

    • Tungsten filament

    • A (mm)

    • 75

    • B (mm)

    • 6

    • C (mm)

    • 25

    • D (mm)

    • -

    • Typical current (A)

    • 40-60

    • Part number

    • 100104

    • WB2

    • Tungsten basket

    • 75

    • 4.8

    • 12

    • -

    • 40-60

    • 100152

    • Type

    • WB2

    • Description

    • Tungsten basket

    • A (mm)

    • 75

    • B (mm)

    • 4.8

    • C (mm)

    • 12

    • D (mm)

    • -

    • Typical current (A)

    • 40-60

    • Part number

    • 100152

    • WB6

    • Tungsten basket

    • 75

    • 13

    • 12

    • -

    • 80-100

    • 100156

    • Type

    • WB6

    • Description

    • Tungsten basket

    • A (mm)

    • 75

    • B (mm)

    • 13

    • C (mm)

    • 12

    • D (mm)

    • -

    • Typical current (A)

    • 80-100

    • Part number

    • 100156

    • MC1

    • Molybdenum dimple boat

    • 48

    • 5

    • 1.5

    • 6

    • 60-70

    • 100201

    • Type

    • MC1

    • Description

    • Molybdenum dimple boat

    • A (mm)

    • 48

    • B (mm)

    • 5

    • C (mm)

    • 1.5

    • D (mm)

    • 6

    • Typical current (A)

    • 60-70

    • Part number

    • 100201

    • WC1

    • Tungsten dimple boat

    • 48

    • 5

    • 1.5

    • 6

    • 70-80

    • 100202

    • Type

    • WC1

    • Description

    • Tungsten dimple boat

    • A (mm)

    • 48

    • B (mm)

    • 5

    • C (mm)

    • 1.5

    • D (mm)

    • 6

    • Typical current (A)

    • 70-80

    • Part number

    • 100202

    • TC1

    • Tantalum dimple boat

    • 48

    • 5

    • 1.5

    • 6

    • 50-60

    • 100203

    • Type

    • TC1

    • Description

    • Tantalum dimple boat

    • A (mm)

    • 48

    • B (mm)

    • 5

    • C (mm)

    • 1.5

    • D (mm)

    • 6

    • Typical current (A)

    • 50-60

    • Part number

    • 100203

    • MC3

    • Molybdenum dimple boat

    • 48

    • 9

    • 3

    • 10

    • 100-120

    • 100301

    • Type

    • MC3

    • Description

    • Molybdenum dimple boat

    • A (mm)

    • 48

    • B (mm)

    • 9

    • C (mm)

    • 3

    • D (mm)

    • 10

    • Typical current (A)

    • 100-120

    • Part number

    • 100301

    • WC3

    • Tungsten dimple boat

    • 48

    • 9

    • 3

    • 10

    • 140-150

    • 100302

    • Type

    • WC3

    • Description

    • Tungsten dimple boat

    • A (mm)

    • 48

    • B (mm)

    • 9

    • C (mm)

    • 3

    • D (mm)

    • 10

    • Typical current (A)

    • 140-150

    • Part number

    • 100302

    • TC3

    • Tantalum dimple boat

    • 48

    • 9

    • 3

    • 10

    • 100-120

    • 100303

    • Type

    • TC3

    • Description

    • Tantalum dimple boat

    • A (mm)

    • 48

    • B (mm)

    • 9

    • C (mm)

    • 3

    • D (mm)

    • 10

    • Typical current (A)

    • 100-120

    • Part number

    • 100303

    • WC4AO

    • Alumina-coated tungsten dimple boat

    • 102

    • 12

    • 3

    • 13

    • 130-140

    • 100501

    • Type

    • WC4AO

    • Description

    • Alumina-coated tungsten dimple boat

    • A (mm)

    • 102

    • B (mm)

    • 12

    • C (mm)

    • 3

    • D (mm)

    • 13

    • Typical current (A)

    • 130-140

    • Part number

    • 100501

These liners are matched to the Edwards / HHV EB3 electron beam source. Available in graphite, molybdenum, boron nitride, intermetallic and aluminium oxide.
We also offer replacement filaments for the EB3 source. The EB3 filament also fits the older Edwards EB1 source.

Electron Beam Sources | Ion Beam Technology

EB3 electron beam source crucible liners and filaments

    • Type

    • Description

    • Part number

    • Equivalent to Edwards number

    • Type

    • Type

    • Description

    • Description

    • Part number

    • Part number

    • Equivalent to Edwards number

    • Equivalent to Edwards number

    • 4CCGR

    • Graphite liner for EB source with 4cc crucible

    • 100401

    • E09088030

    • Type

    • 4CCGR

    • Description

    • Graphite liner for EB source with 4cc crucible

    • Part number

    • 100401

    • Equivalent to Edwards number

    • E09088030

    • 4CCGR

    • Molybdenum liner for EB3 source with 4cc crucible

    • 100402

    • E09088032

    • Type

    • 4CCGR

    • Description

    • Molybdenum liner for EB3 source with 4cc crucible

    • Part number

    • 100402

    • Equivalent to Edwards number

    • E09088032

    • 4CCBN

    • Boron nitride liner for EB3 source with 4cc crucible

    • 100403

    • -

    • Type

    • 4CCBN

    • Description

    • Boron nitride liner for EB3 source with 4cc crucible

    • Part number

    • 100403

    • Equivalent to Edwards number

    • -

    • 4CCIN

    • Intermetallic liner for EB3 source with 4cc crucible

    • 100404

    • E09088033

    • Type

    • 4CCIN

    • Description

    • Intermetallic liner for EB3 source with 4cc crucible

    • Part number

    • 100404

    • Equivalent to Edwards number

    • E09088033

    • 4CCAO

    • Aluminium oxide liner for EB3 source with 4cc crucible

    • 100405

    • -

    • Type

    • 4CCAO

    • Description

    • Aluminium oxide liner for EB3 source with 4cc crucible

    • Part number

    • 100405

    • Equivalent to Edwards number

    • -

    • EB3FIL

    • Filament for the EB3 source (also fits EB1)

    • 100411

    • E03615005

    • Type

    • EB3FIL

    • Description

    • Filament for the EB3 source (also fits EB1)

    • Part number

    • 100411

    • Equivalent to Edwards number

    • E03615005

High-quality 14mm diameter, 6MHz quartz crystals for use with Edwards FTM5, FTM6 and FTM7 film thickness monitors, plus equipment from Inficon, Sigma, Intellemetrics and other manufacturers.

Thermal Evaporation System | Electron Beam Sources

Quartz monitor crystals :

    • Type

    • Description

    • Part number

    • Equivalent to Edwards number

    • Type

    • Type

    • Description

    • Description

    • Part number

    • Part number

    • Equivalent to Edwards number

    • Equivalent to Edwards number

    • CRYS01

    • 14mm, 6MHz quartz crystal, gold coated

    • 300021

    • E08668000

    • Type

    • CRYS01

    • Description

    • 14mm, 6MHz quartz crystal, gold coated

    • Part number

    • 300021

    • Equivalent to Edwards number

    • E08668000

    • CRYS02

    • 14mm, 6MHz quartz crystal, silver coated

    • 300022

    • -

    • Type

    • CRYS02

    • Description

    • 14mm, 6MHz quartz crystal, silver coated

    • Part number

    • 300022

    • Equivalent to Edwards number

    • -

Spares

Resistance source | Thin Film Technology

E09028000 : Resistance source

Domed bell jar chambers | Vacuum Equipment Manufacturer

Domed bell jar chambers

Carbon rod source | Thermal Evaporation System

E09039000 : Carbon rod source

Cylindrical glass chambers | Thin Film Technology

Cylindrical glass chambers

    • Original Product code

    • Description

    • Original Product code

    • Original Product code

    • Description

    • Description

    • D15701042

    • Fluoroelastomer gasket Scancoat6

    • Original Product code

    • D15701042

    • Description

    • Fluoroelastomer gasket Scancoat6

    • E00100202

    • Nitrile gasket Scancoat6

    • Original Product code

    • E00100202

    • Description

    • Nitrile gasket Scancoat6

    • E00100234

    • Emitter flanged insulating bush

    • Original Product code

    • E00100234

    • Description

    • Emitter flanged insulating bush

    • E02512000

    • Domed bell jar kit 

    • Original Product code

    • E02512000

    • Description

    • Domed bell jar kit 

    • E02701003

    • Carbon Rod 6.35 X 120mm Long

    • Original Product code

    • E02701003

    • Description

    • Carbon Rod 6.35 X 120mm Long

    • E02703004

    • Cermet Hearth 6 Position EBS Pk5

    • Original Product code

    • E02703004

    • Description

    • Cermet Hearth 6 Position EBS Pk5

    • E03300012

    • Insulator Bush

    • Original Product code

    • E03300012

    • Description

    • Insulator Bush

    • E03615005

    • Filament For EB1/EB3 Sources Pack Of 10

    • Original Product code

    • E03615005

    • Description

    • Filament For EB1/EB3 Sources Pack Of 10

    • E03615015

    • Magnet For Bent Beam Source

    • Original Product code

    • E03615015

    • Description

    • Magnet For Bent Beam Source

    • E03615017

    • Liner Intermetallic Hearth

    • Original Product code

    • E03615017

    • Description

    • Liner Intermetallic Hearth

    • E03615018

    • Copper Crucible Hearth For Bent Beam source

    • Original Product code

    • E03615018

    • Description

    • Copper Crucible Hearth For Bent Beam source

    • E03615021

    • Carbon Hearth Liner For Bent Beam Source

    • Original Product code

    • E03615021

    • Description

    • Carbon Hearth Liner For Bent Beam Source

    • E03619015

    • Filaments 6 Position EBS Pk5

    • Original Product code

    • E03619015

    • Description

    • Filaments 6 Position EBS Pk5

    • E04805011

    • Gasket 12 Viton for E306 / Auto306 chamber

    • Original Product code

    • E04805011

    • Description

    • Gasket 12 Viton for E306 / Auto306 chamber

    • E05201000

    • Specimen cooling finger

    • Original Product code

    • E05201000

    • Description

    • Specimen cooling finger

    • E06900067

    • Implosion Guard Closed E306A

    • Original Product code

    • E06900067

    • Description

    • Implosion Guard Closed E306A

    • E06900155

    • Implosion Guard Open E306A

    • Original Product code

    • E06900155

    • Description

    • Implosion Guard Open E306A

    • E06902002

    • Workchamber 12 x 14 E306A Glass Cylinder

    • Original Product code

    • E06902002

    • Description

    • Workchamber 12 x 14 E306A Glass Cylinder

    • E08508040

    • 3mm Carbon Rod Shaper

    • Original Product code

    • E08508040

    • Description

    • 3mm Carbon Rod Shaper

    • E08519011

    • Fixed Collett 6.35mm

    • Original Product code

    • E08519011

    • Description

    • Fixed Collett 6.35mm

    • E08519012

    • Moving Collett 6.35mm

    • Original Product code

    • E08519012

    • Description

    • Moving Collett 6.35mm

    • E08519013

    • Moving Collett 3mm

    • Original Product code

    • E08519013

    • Description

    • Moving Collett 3mm

    • E08519015

    • Spring Carbon Evaporation Source

    • Original Product code

    • E08519015

    • Description

    • Spring Carbon Evaporation Source

    • E08519018

    • Mica Insulator C Evs 

    • Original Product code

    • E08519018

    • Description

    • Mica Insulator C Evs 

    • E08519022

    • Fixed Collett 3mm

    • Original Product code

    • E08519022

    • Description

    • Fixed Collett 3mm

    • E08519030

    • Carbon Rod 3mm X 300mm Pk 20

    • Original Product code

    • E08519030

    • Description

    • Carbon Rod 3mm X 300mm Pk 20

EB3 Electron beam source, spares, and accessories

Electron-Beam Technology | Thin Film Technology

E09072000 EB3 source plus filaments and hearth liners

    • Original Product code

    • Description

    • Original Product code

    • Original Product code

    • Description

    • Description

    • E08535000

    • TEM magnetic grid holder for Rotatilt3

    • Original Product code

    • E08535000

    • Description

    • TEM magnetic grid holder for Rotatilt3

    • E08569003

    • Braid Assembly

    • Original Product code

    • E08569003

    • Description

    • Braid Assembly

    • E08570011

    • Motor & Gearbox Rotatilt 3

    • Original Product code

    • E08570011

    • Description

    • Motor & Gearbox Rotatilt 3

    • E08571000

    • 3mm TEM Grid Holder For Rotatilt 3

    • Original Product code

    • E08571000

    • Description

    • 3mm TEM Grid Holder For Rotatilt 3

    • E08572000

    • SEM Planetary Workholder For Rotatilt 3

    • Original Product code

    • E08572000

    • Description

    • SEM Planetary Workholder For Rotatilt 3

    • E08573000

    • Plane Workholder For Rotatilt3

    • Original Product code

    • E08573000

    • Description

    • Plane Workholder For Rotatilt3

    • E08664000

    • FTM6 Film Thickness Monitor

    • Original Product code

    • E08664000

    • Description

    • FTM6 Film Thickness Monitor

    • E08666000

    • FTM5/FTM6/FTM7 Oscillator & Cable

    • Original Product code

    • E08666000

    • Description

    • FTM5/FTM6/FTM7 Oscillator & Cable

    • E08667000

    • FTM5/FTM6/FTM7 Crystal Holder

    • Original Product code

    • E08667000

    • Description

    • FTM5/FTM6/FTM7 Crystal Holder

    • E08667002

    • Cable Assembly 750mm Long

    • Original Product code

    • E08667002

    • Description

    • Cable Assembly 750mm Long

    • E08667018

    • Spring Clip Spare

    • Original Product code

    • E08667018

    • Description

    • Spring Clip Spare

    • E08668000

    • Spare Crystals FTM5/6/7 Pk5

    • Original Product code

    • E08668000

    • Description

    • Spare Crystals FTM5/6/7 Pk5

    • E08669000

    • FTM7 Film Thickness Monitor

    • Original Product code

    • E08669000

    • Description

    • FTM7 Film Thickness Monitor

    • E08703047

    • Cylinder Glass S150A/B ETD4 Scancoat 6

    • Original Product code

    • E08703047

    • Description

    • Cylinder Glass S150A/B ETD4 Scancoat 6

    • E08703048

    • Implosion Guard For S150A

    • Original Product code

    • E08703048

    • Description

    • Implosion Guard For S150A

    • E08712072

    • Copper Target For Scancoat 6 & S150B

    • Original Product code

    • E08712072

    • Description

    • Copper Target For Scancoat 6 & S150B

    • E08732000

    • Platinum Target Scancoat 6 &S150B

    • Original Product code

    • E08732000

    • Description

    • Platinum Target Scancoat 6 &S150B

    • E08733000

    • Gold/Palladium Target, SC6 & S150B

    • Original Product code

    • E08733000

    • Description

    • Gold/Palladium Target, SC6 & S150B

    • E08734000

    • Iron Target For Scancoat 6 & S150B

    • Original Product code

    • E08734000

    • Description

    • Iron Target For Scancoat 6 & S150B

    • E08741000

    • Shutter For Scancoat 6 & S150B

    • Original Product code

    • E08741000

    • Description

    • Shutter For Scancoat 6 & S150B

    • E08742000

    • Metallurgical Sample Holder For S150B

    • Original Product code

    • E08742000

    • Description

    • Metallurgical Sample Holder For S150B

    • E09020000

    • Bell Jar Lift For Auto306

    • Original Product code

    • E09020000

    • Description

    • Bell Jar Lift For Auto306

    • E09021000

    • Plasmaglo glow-discharge accessory

    • Original Product code

    • E09021000

    • Description

    • Plasmaglo glow-discharge accessory

    • E09022000

    • Tripod

    • Original Product code

    • E09022000

    • Description

    • Tripod

Electrical feed throughs

Electrical feed throughs | Thermal Evaporation System

E10014000 and E10034000

    • Original Product code

    • Description

    • Original Product code

    • Original Product code

    • Description

    • Description

    • E09023000

    • Baffle plate

    • Original Product code

    • E09023000

    • Description

    • Baffle plate

    • E09024000

    • Quartz Lamp Heater 500W

    • Original Product code

    • E09024000

    • Description

    • Quartz Lamp Heater 500W

    • E09025000

    • DC glow discharge bar

    • Original Product code

    • E09025000

    • Description

    • DC glow discharge bar

    • E09026000

    • Radiant Heater For Auto 306

    • Original Product code

    • E09026000

    • Description

    • Radiant Heater For Auto 306

    • E09027000

    • Glass Cylinder Chamber Kit For Auto 306

    • Original Product code

    • E09027000

    • Description

    • Glass Cylinder Chamber Kit For Auto 306

    • E09028000

    • Filament Holder For Auto 306

    • Original Product code

    • E09028000

    • Description

    • Filament Holder For Auto 306

    • E09029000

    • Rotatilt 3 work holder drive unit

    • Original Product code

    • E09029000

    • Description

    • Rotatilt 3 work holder drive unit

    • E09032000

    • Manual Source shutter

    • Original Product code

    • E09032000

    • Description

    • Manual Source shutter

    • E09033000

    • LT selector switch

    • Original Product code

    • E09033000

    • Description

    • LT selector switch

    • E09035000

    • HT/LT current controller

    • Original Product code

    • E09035000

    • Description

    • HT/LT current controller

    • E09037018

    • Insulator Pvzm0300

    • Original Product code

    • E09037018

    • Description

    • Insulator Pvzm0300

    • E09037019

    • Insulator Pvzm0301

    • Original Product code

    • E09037019

    • Description

    • Insulator Pvzm0301

    • E09037026

    • Intermetallic Hearth Pk Of 5

    • Original Product code

    • E09037026

    • Description

    • Intermetallic Hearth Pk Of 5

    • E09038000

    • Four position turret resistance source

    • Original Product code

    • E09038000

    • Description

    • Four position turret resistance source

    • E09038018

    • Split Bush Female Insulator

    • Original Product code

    • E09038018

    • Description