HHV LtdThin film deposition tools for science and industry

HHV LtdThin film deposition tools for science and industry

Auto 500 GB deposition system for glove box integration

The Auto 500GB is designed for deposition of electronic materials in applications such as organic photovoltaics (OPVs) and Perovskites in solar cell research and thin film batteries. The system allows straightforward integration into glove boxes from most major manufacturers. Chambers have front and rear doors for loading and service without compromising the glove box atmosphere.

Features

    500mm chambers
    Full integration into industry-standard glove boxes
    HHV temperature-controlled effusion sources
    Ebeam and sputter options
    Single or multiple resistance sources
    Integrated film thickness monitoring and control
Made with