HHV LtdThin film deposition tools for science and industry

HHV LtdThin film deposition tools for science and industry

SAARA Series

The SAARA platform is made of superior performance single block aluminium chamber to deposit electronic and optical coatings of the highest quality. The SAARA platform comes with a load-lock chamber, automated substrate transfer mechanism and a touch-screen PC with complete process automation.

Features

    Substrate plate to accommodate up to 8” wafers
    Built-in process recipes
    Substrate biasing options of DC, Pulsed DC or RF
    Compact cabinet design offering minimized footprint
    In-situ cleaning
    Dual frequency (RF & LF) power supply for film stress control
    Substrate heating up to 800°C
Made with