HHV LtdThin film deposition tools for science and industry

HHV LtdThin film deposition tools for science and industry

TF 600 box coaters for advanced research and production

TF 600 tools provide enhanced process capability in electronics and optical research and production. They feature powerful vacuum systems and full process control for high throughput in laboratory or factory environments.


Features

    Spacious 600mm wide chamber
    Full deposition process control
    Supports ion-assisted processes
    E-beam, RF, DC or pulsed sputtering
    Range of load locks and sample transport
    Rotary, biased, heated work holders
Made with