Deposition system products

Our deposition systems range from bench-top sputter coaters for EM through the well-known Auto306 and Auto500 laboratory systems to the TF500 to TF800 range of box coaters. We also offer special-purpose systems for applications including forensics, optical deposition and mirror coaters for 3 metre astronomical telescopes

BT150 and BT300 Bench Top Coaters

BT150 and BT300 Bench Top Coaters

New bench-top deposition tools for SEM and TEM sample prep, plus R&D applications

The new HHV BT150 and BT300 are compact and economical bench top coating systems designed to suit the needs of electron microscopists and researchers.

Both systems are designed for ease of use and feature a full-colour, menu-driven, touch-screen control system for fully-automatic control. The control system can store up..

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Auto306 Lab Coater

Auto306 Lab Coater

Versatility for the researcher and the electron microscopist

The HHV Auto306 is a versatile and compact coating system which has been developed to meet the demands of the researcher and electron microscopist.
With its full range of vacuum systems, chamber and modular process accessories the Auto306 offers a range of techniques to complement the modern lab..

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ATS500 Research and Production Coater

ATS500 Research and Production Coater

New 500mm coating systems for research and production applications

ATS500 is a highly versatile coating system, designed for advanced research and production. It features touch-panel control and a wide range of process techniques, including ion beam. ATS is applied to electronics, optics and ion-assisted processes.

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Auto500GB Glove Box Deposition System

Auto500GB Glove Box Deposition System

HHV Auto500GB deposition system for glove box integration

The Auto500GB is designed for integration into glove boxes which are used where oxygen or water vapour-intolerant electronic materials are to be coated. The system is fitted with a special chamber to allow straightforward integration into glove boxes from most major manufacturers. The chamber is fitted with a vertically-opening front door w..

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TF500, TF600, TF800 Box Coaters

TF500, TF600, TF800 Box Coaters

Versatile box coaters with ion beam capability

The HHV TF500, TF600 and TF800 are developed for enhanced levels of process capability. A choice of chamber sizes and accessories, deposition techniques, work holders, load locks and pumping options allow the system to be configured to your exact needs. TF500 allows multiple sources to be accommodated while TF600 and TF800 add the benefits of io..

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ID500, ID750 Forensic Coaters

ID500, ID750 Forensic Coaters

Forensic coating systems

The original metal deposition systems for fingerprint development

Now built by HHV, the ID500 and ID750 forensic coaters are used for the detection of fingerprints using the Vacuum Metal Deposition (VMD) technique developed by the UK Home Office and Edwards in the 1960s and 1970s. Indeed the original UK Home Office specification for 600mm and later 750mm VMD systems w..

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CT150 PECVD Tool

CT150 PECVD Tool

Cluster PECVD tool for R&D

CT150 is a cluster tool for the deposition of silicon layer for thin film & Hetro-junction Intrin..

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ION-ETCH 150 RIE Tool

ION-ETCH 150 RIE Tool

RIE For Nano Fabrications

The HHV ION-ETCH 150 Reactive Ion Etching system is a compact system for use in nanofabrication technology applications. The capacitively-coupled plasma reactor is configured for the etching of silicon based materials, compound semiconductors, dielectrics, sputtered metal films, polymer and other materials. The 300 mm chamber can take substrates up to 6” diameter and ..

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Custom Systems

Custom Systems

Excellence in Special Systems Engineering,

HHV Ltd offers a wide range of special-purpose and customised thin film deposition systems for research, scientific and industrial applications. These include systems for electronics, optical films, electro-optic devices, medical, aerospace and materials technology:-

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