Film Thickness Monitoring and Process Control

Film Thickness Monitoring and Process Control

A film thickness monitor using a quartz crystal microbalance is fitted where the customer wishes to see the deposition rate and total thickness of a thin film during deposition. HHV offers these with single or dual monitor heads and manual or automated source shutters. Automatic shutters can close when a pre-set thickness is reached.

Film thickness controllers also display the deposition rate and total thickness but are capable of controlling the deposition sources to provide a user-defined rate and thickness. These controllers are ideal for multi-layer films and for production applications.

HHV offers quartz crystal film thickness monitors and controllers with a range of features to suit different customer applications and budgets. Where systems have PC control, the PC can drive the monitor or controller as required to achieve complete source selection and deposition control.